英特格ENTEGRIS純化器現(xiàn)貨，
GPUS300NCX04R02CA，36個
GPUS5000FHX08R00CA，36個
GPUS5000FIX08R00CA，2個
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Entegris 的 9N 氣體純化器是一類能將氣體純度提升至 9 個 9（即雜質(zhì)含量小于 1ppb）級別的高端純化設(shè)備，結(jié)合你提到的適用氣體種類及流量參數(shù)，其相關(guān)特性如下：
適用氣體：可對 N?、Ar、He、Kr、Ne、Xe 等惰性氣體，以及 CF?、CH?、C?H?、C?H?、C?H??等鹵代烴和烴類氣體進行純化。
不同氣體的純化原理和內(nèi)部配置可能會有差異，但均旨在高效去除其中的 H?O、O?、CO、CO?、烴類等雜質(zhì)，以滿足半導(dǎo)體、科研等對氣體純度要求極高的領(lǐng)域需求。
流量規(guī)格：流量為 500slpm（標(biāo)準(zhǔn)升每分鐘），屬于中流量級別。
Entegris 有不同系列的產(chǎn)品可覆蓋該流量需求，例如其 GateKeeper 系列部分型號能滿足類似流量范圍，可根據(jù)具體工藝需求和其他參數(shù)進一步選型適配。
純度性能：作為 9N 級純化器，通常要求進氣純度在 5 個 9 及以上，經(jīng)過純化后可實現(xiàn)氣體雜質(zhì)含量低于 1ppb 的超純水平，
能夠為對氣體純度極為敏感的工藝環(huán)節(jié)提供穩(wěn)定可靠的高純氣體供應(yīng)。
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?MICROCONTAMINATION?CONTROL
GateKeeper
?GPU?
IX?Media?Gas?Purifiers
Superior?purity?control
Entegris’?GateKeeper?GPU?gas?purifiers?were?designed?
to?improve?purity?consistency,?lifetime,?and?final?purity?in?
microelectronics?applications?where?high-purity?gas?is?critical.?
Leveraging?our?expertise?in?material?science,?we?have?developed?
a?new?generation?of?IX?gas?purification?products?that?deliver?
unsurpassed?value?and?performance.
APPLICATIONS
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??Semiconductor
??Data?storage
??Flat?panel?display
??LED
??Solar
FEATURES?&?BENEFITS
—
Process?control?and?protection?Purity?control?below?part-per-billion?(ppb)?levels
Low?pressure?drop?through?the?purifier
CE?certified?to?the?Pressure?Equipment?Directive?(PED)?
Manufactured?in?an?ISO?9001:2015?facility
Cost?effective?Regenerable?–?eliminates?disposal?issues?and?costs
Long?lifetime?—?improves?cost?of?ownership
Safe?and?simple?to?use?Uses?ambient?temperature?purification?—?no?heat?or?power?required?to?operate
Insensitive?to?orientation?(horizontal?/?vertical)?
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?Outlet?particle?filter?Wafergard?—?316?stainless?steel?membrane,?20?μm?or?0.0015?μm
Lifetime?One?year?with?an?inlet?challenge?of?1?ppm?moisture?and?1?ppm?oxygen?with?flow?
rates?shown?on?the?next?page.
The?lifetime?varies?with?the?inlet?impurities?and?flow?rate.?Contact?Entegris?for?
application?specific?lifetime?calculations.
Regenerable?Yes?(Regeneration?is?not?recommended?if?process?gas?is?CF4)
Dangerous?goods?(DG)?Yes,?UN3190,?Class?4.2
Operating?temperature?0°??–?65°C?(32°??–?149°F)
Leak?rating?1?×?10-9?atm?ccc?of?He
Materials?of?construction?Housing:?316L?stainless?steel
Certification?CE?certified?to?the?Pressure?Equipment?Directive?(PED)
Designed?in?accordance?with?ASME
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OPERATING SPECIFICATIONS
GPU 15 0.5 slpm 0.3 slpm 2,000 psig 250 psig – 0.1 psid
GPU 35 1 slpm 1.0 slpm 1,400 psig 250 psig – 0.3 psid
GPU 70 5 slpm 1.6 slpm 1,400 psig 250 psig – 0.5 psid
GPU 80 10 slpm 1.9 slpm 1,400 psig 250 psig – 1.0 psid
GPU 100 20 slpm 2.6 slpm 1,000 psig 250 psig – 16.7 psid
GPU 200 20 slpm 4.2 slpm 800 psig 250 psig – 0.7 psid
GPU 300 50 slpm 6.3 slpm 800 psig 250 psig – 1.3 psid
GPU 500 75 slpm 13.0 slpm 600 psig 250 psig – 1.3 psid
GPU 700 120 slpm 18.0 slpm 600 psig 250 psig – 1.8 psid
GPU 2500 4R 300 slpm 65.0 slpm 505 psig 250 psig – 5.0 psid
GPU 2500 8R 500 slpm 65.0 slpm 505 psig 250 psig – 5.6 psid
GPU 3000 500 slpm 75.0 slpm 505 psig 250 psig – 5.6 psid
GPU 5000 500 slpm 125.0 slpm 505 psig 250 psig – 7.0 psid
GPU 10M 8R 1,000 slpm 260.0 slpm 370 psig 250 psig – 5.8 psid
GPU 10M 12R 1,000 slpm 260.0 slpm 370 psig 250 psig – 8.0 psid
GPU 13M 12R 2,000 slpm 320.0 slpm 370 psig 250 psig 2.0 psid –
GPU 13M 16R 2,500 slpm 320.0 slpm 370 psig 250 psig 3.0 psid –
GPU 17M 12R 2,000 slpm 400.0 slpm 370 psig 250 psig 2.0 psid –
GPU 17M 16R 2,500 slpm 400.0 slpm 370 psig 250 psig 3.0 psid –
GPU 20M 12R 2,000 slpm 480.0 slpm 370 psig 250 psig – 19.0 psid
GPU 20M 16R 2,500 slpm 480.0 slpm 370 psig 250 psig – 19.0 psid
*Purifier only at maximum flow rating with 90 psig inlet pressure
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FACILITY SPECIFICATIONS
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GPU 15 1/4" Male/male 25.4 mm (1.0") 84 mm (3.3") 0.2 kg (0.4 lbs)
GPU 35 1/4" Male/male 38.1 mm (1.5") 84 mm (3.3") 0.3 kg (0.7 lbs)
GPU 70 1/4" Male/male 38.1 mm (1.5") 114 mm (4.5") 0.3 kg (0.7 lbs)
GPU 80 1/4" Male/male 38.1 mm (1.5") 127 mm (5.0") 0.3 kg (0.7 lbs)
GPU 100 1/4” Male/male N/A 84 mm (3.3") 0.9 kg (2.0 lbs)
GPU 200 1/4" Male/male 50.8 mm (2.0") 157 mm (6.2") 0.9 kg (2.0 lbs)
GPU 300 1/4" Male/male 50.8 mm (2.0") 208 mm (8.2") 1.1 kg (2.5 lbs)
GPU 500 1/4" Male/male 76.2 mm (3.0") 201 mm (7.9") 1.8 kg (4.0 lbs)
GPU 700 1/4" Male/male 76.2 mm (3.0") 254 mm (10.0") 2.5 kg (5.5 lbs)
GPU 2500 4R 1/4" Male/male 101.6 mm (4.0") 439 mm (17.3") 6.8 kg (15 lbs)
GPU 2500 8R 1/2" Male/male 101.6 mm (4.0") 445 mm (17.5") 6.8 kg (15 lbs)
GPU 3000 1/2" Male/male 101.6 mm (4.0") 508 mm (20.0") 7.3 kg (16 lbs)
GPU 5000 1/2" Male/male 101.6 mm (4.0") 785 mm (30.9") 10.0 kg (22 lbs)
GPU 10M 8R 1/2" Male/male 152.4 mm (6.0") 737 mm (29.0") 20 kg (44 lbs)
GPU 10M 12R 3/4" Male/male 152.4 mm (6.0") 749 mm (29.5") 21.8 kg (48 lbs)
GPU 13M 12R 3/4" Male/male 152.4 mm (6.0") 892 mm (35.1") 24.9 kg (55 lbs)
GPU 13M 16R 1" Male/male 152.4 mm (6.0") 899 mm (35.4") 24.9 kg (55 lbs)
GPU 17M 12R 3/4" Male/male 152.4 mm (6.0") 1085 mm (42.7") 29.5 kg (65 lbs)
GPU 17M 16R 1" Male/male 152.4 mm (6.0") 1090 mm (42.9") 29.5 kg (65 lbs)
GPU 20M 12R 3/4" Male/male 152.4 mm (6.0") 1290 mm (50.8") 34 kg (75 lbs)
GPU 20M 16R 1" Male/male 152.4 mm (6.0") 1296 mm (51.0") 34 kg (75 lbs)
GPU 15 1/4" Female/female 25.4 mm (1.0") 234 mm (9.2") 1.1 kg (2.4 lbs)
GPU 35 1/4" Female/female 38.1 mm (1.5") 234 mm (9.2") 1.2 kg (2.6 lbs)
GPU 70 1/4" Female/female 38.1 mm (1.5") 264 mm (10.4") 1.3 kg (2.9 lbs)
GPU 80 1/4" Female/female 38.1 mm (1.5") 277 mm (10.9") 1.3 kg (2.9 lbs)
GPU 100 1/4” Female/female N/A 234 mm (9.2") 1.3 kg (2.9 lbs)
GPU 200 1/4" Female/female 50.8 mm (2.0") 307 mm (12.1") 1.7 kg (3.7 lbs)
GPU 300 1/4" Female/female 50.8 mm (2.0") 358 mm (14.1") 1.8 kg (3.8 lbs)
GPU 300 (GC 300) 1/4" Female/male 83.8 mm (3.3") 401.3 mm (15.8") 2.3 kg (5.1 lbs)
GPU 500 1/4" Female/female 76.2 mm (3.0") 351 mm (13.8") 2.7 kg (6.0 lbs)
GPU 700 1/4" Female/female 76.2 mm (3.0") 404 mm (15.9") 4.4 kg (9.6 lbs)
GPU 2500 4R 1/4" Female/female 101.6 mm (4.0") 592 mm (23.3") 6.8 kg (15 lbs)
GPU 2500 8R 1/2" Female/female 101.6 mm (4.0") 714 mm (28.1") 8.0 kg (17.7 lbs)
GPU 3000 1/2" Female/female 101.6 mm (4.0") 777 mm (30.6") 8.5 kg (18.7 lbs)
GPU 5000 1/2" Female/female 101.6 mm (4.0") 1054 mm (41.5") 12.5 kg (27.6 lbs)
GPU 10M 8R 1/2" Female/male 152.4 mm (6.0") 970 mm (38.2") 22.5 kg (49.6 lbs)
GPU 10M 12R 3/4" Female/female 152.4 mm (6.0") 1125 mm (44.3") 24.9 kg (55.0 lbs)
GPU 13M 12R 3/4" Female/female 152.4 mm (6.0") 1270 mm (50.0") 28.1 kg (62.0 lbs)
GPU 13M 16R 1" Female/female 152.4 mm (6.0") 1308 mm (51.5") 29.5 kg (65.0 lbs)
GPU 17M 12R 3/4" Female/female 152.4 mm (6.0") 1461 mm (57.5") 32.7 kg (72.0 lbs)
GPU 17M 16R 1" Female/female 152.4 mm (6.0") 1499 mm (59.0") 34.0 kg (75.0 lbs)
GPU 20M 12R 3/4" Female/female 152.4 mm (6.0") 1666 mm (65.6") 37.2 kg (82.0 lbs)
GPU 20M 16R 1" Female/female 152.4 mm (6.0") 1705 mm (67.1") 38.6 kg (85.0 lbs)
